SEMES(CEO Tae-Gyeong Chung) announced on the 24th that it has developed the first ArF-i and Spinner (equipment name Omega Prime),

a track equipment for semiconductor photo processing that has been dependent on imports, and started mass production this year.

Spinners are designed to create micro-circuiting (patterning) on wafers in semiconductor manufacturing processes

It is a facility that applies a photo-resist evenly and develops it again after irradiating light from an exposure machine.

This equipment is currently monopolized by Tokyo Electron (TEL), Japan's largest semiconductor equipment company, with a market share of more than 90%.

SEMES has been producing CrF spinners and has developed ArF-i Fluoride Immersion (ArF-i) equipment

to cope with high-performance exposure machines with shorter wavelength line widths of light sources.

The company explained that the argon fluoride emitter equipment is a high-tech facility that requires high cleanliness, high productivity, and high precision.

SEMES developed and applied automated systems such as robot positioning, bake temperature setting, and nozzle adjustment

to eliminate adjustment deviation of coating and development process units, and also installed specialized technologies

such as vision monitoring function system and bake automatic correction.

CTO Gil-Heyun Choi said "We expect the import substitution effect to be great in the future due to the development of Omega Prime, a core semiconductor process equipment"

and "We will be reborn as a technology innovation company by introducing unique and differentiated equipment centered on high value-added."